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1

Low Dielectric Constant Materials

Volksen, Willi, Miller, Robert D., Dubois, Geraud

Journal:

Chemical Reviews

Année:

2010

Langue:

english

Fichier:

PDF, 2.86 MB

english, 2010

2

Residual stress behaviour of isomeric PMDA-ODA polyimides

Moonhor Ree, Thomas L. Nunes, George Czornyj, Willie Volksen

Journal:

Année:

1992

Langue:

english

Fichier:

PDF, 967 KB

english, 1992

3

SPIE Proceedings [SPIE SPIE'S 1993 Symposium on Microlithography - San Jose, CA (Sunday 28 February 1993)] Advances in Resist Technology and Processing X - Base-catalyzed photosensitive polyimide

McKean, Dennis R., Wallraff, Gregory M., Volksen, Willi, Hacker, Nigel P., Sanchez, Martha I., Labadie, Jeff W., Hinsberg, William D.

Année:

1993

Langue:

english

Fichier:

PDF, 885 KB

english, 1993

4

Templating Nanoporosity in Thin-Film Dielectric Insulators

James L. Hedrick, Robert D. Miller, Craig J. Hawker, Kenneth R. Carter, Willi Volksen, Do Y. Yoon, Mikael Trollsås

Journal:

Advanced Materials

Année:

1998

Langue:

english

Fichier:

PDF, 253 KB

english, 1998

5

Superior mechanical properties of dense and porous organic/inorganic hybrid thin films

Geraud Dubois, Willi Volksen, Teddie Magbitang, Mark H. Sherwood, Robert D. Miller, David M. Gage, Reinhold H. Dauskardt

Journal:

Journal of Sol-Gel Science and Technology

Année:

2008

Langue:

english

Fichier:

PDF, 364 KB

english, 2008

6

A buckling-based metrology for measuring the elastic moduli of polymeric thin films

Stafford, Christopher M., Harrison, Christopher, Beers, Kathryn L., Karim, Alamgir, Amis, Eric J., VanLandingham, Mark R., Kim, Ho-Cheol, Volksen, Willi, Miller, Robert D., Simonyi, Eva E.

Journal:

Nature Materials

Année:

2004

Langue:

english

Fichier:

PDF, 372 KB

english, 2004

7

Effect of plasma interactions with low-κ films as a function of porosity, plasma chemistry, and temperature

Worsley, Marcus A., Bent, Stacey F., Gates, Stephen M., Fuller, Nicholas C. M., Volksen, Willi, Steen, Michelle, Dalton, Timothy

Journal:

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures

Année:

2005

Langue:

english

Fichier:

PDF, 700 KB

english, 2005

8

Fundamental limits of material toughening in molecularly confined polymers

Isaacson, Scott G., Lionti, Krystelle, Volksen, Willi, Magbitang, Teddie P., Matsuda, Yusuke, Dauskardt, Reinhold H., Dubois, Geraud

Journal:

Nature Materials

Année:

2015

Langue:

english

Fichier:

PDF, 855 KB

english, 2015

9

Imidization and interdiffusion of poly(amic ethyl ester) precursors of PMDA/3,4′-ODA

Nancy C. Stoffel, Edward J. Kramer, Willi Volksen, Thomas P. Russell

Journal:

Journal of Polymer Science Part B: Polymer Physics

Année:

1998

Langue:

english

Fichier:

PDF, 311 KB

english, 1998

10

Application of Complex Macromolecular Architectures for Advanced Microelectronic Materials

James L. Hedrick, Teddie Magbitang, Eric F. Connor, Thierry Glauser, Willi Volksen, Craig J. Hawker, Victor Y. Lee, Robert D. Miller

Journal:

Chemistry - A European Journal

Année:

2002

Langue:

english

Fichier:

PDF, 469 KB

english, 2002

11

Cover Picture: Chem. Eur. J. 15/2002

James L. Hedrick, Teddie Magbitang, Eric F. Connor, Thierry Glauser, Willi Volksen, Craig J. Hawker, Victor Y. Lee, Robert D. Miller

Journal:

Chemistry - A European Journal

Année:

2002

Fichier:

PDF, 22 KB

2002

12

Molecular-Controlled Fracture and Release of Templated Nanoporous Organosilicate Thin Films

Markus D. Ong, Willi Volksen, Geraud Dubois, Victor Lee, Phillip J. Brock, Vaughn R. Deline, Robert D. Miller, Reinhold H. Dauskardt

Journal:

Advanced Materials

Année:

2008

Langue:

english

Fichier:

PDF, 487 KB

english, 2008

13

Application of the Protection/Deprotection Strategy to the Science of Porous Materials

Theo Frot, Willi Volksen, Sampath Purushothaman, Robert Bruce, Geraud Dubois

Journal:

Advanced Materials

Année:

2011

Langue:

english

Fichier:

PDF, 459 KB

english, 2011

14

Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers

Eric F. Connor, Linda K. Sundberg, Ho-Cheol Kim, Jeroen J. Cornelissen, Teddie Magbitang, Phil M. Rice, Victor Y. Lee, Craig J. Hawker, Willi Volksen, James L. Hedrick, Robert D. Miller

Journal:

Angewandte Chemie

Année:

2003

Langue:

english

Fichier:

PDF, 228 KB

english, 2003

15

Titelbild: Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers (Angew. Chem. 32/2003)

Eric F. Connor, Linda K. Sundberg, Ho-Cheol Kim, Jeroen J. Cornelissen, Teddie Magbitang, Phil M. Rice, Victor Y. Lee, Craig J. Hawker, Willi Volksen, James L. Hedrick, Robert D. Miller

Journal:

Angewandte Chemie

Année:

2003

Fichier:

PDF, 23 KB

2003

16

Oriented Nanoporous Lamellar Organosilicates Templated from Topologically Unsymmetrical Dendritic-Linear Block Copolymers

Teddie Magbitang, Victor Y. Lee, Jennifer N. Cha, Hsiao-Lin Wang, W. Richard Chung, Robert D. Miller, Geraud Dubois, Willi Volksen, Ho-Cheol Kim, James L. Hedrick

Journal:

Angewandte Chemie

Année:

2005

Langue:

english

Fichier:

PDF, 303 KB

english, 2005

17

Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers

Eric F. Connor, Linda K. Sundberg, Ho-Cheol Kim, Jeroen J. Cornelissen, Teddie Magbitang, Phil M. Rice, Victor Y. Lee, Craig J. Hawker, Willi Volksen, James L. Hedrick, Robert D. Miller

Journal:

Angewandte Chemie International Edition

Année:

2003

Langue:

english

Fichier:

PDF, 228 KB

english, 2003

18

Cover Picture: Templating of Silsesquioxane Cross-Linking Using Unimolecular Self-Organizing Polymers (Angew. Chem. Int. Ed. 32/2003)

Eric F. Connor, Linda K. Sundberg, Ho-Cheol Kim, Jeroen J. Cornelissen, Teddie Magbitang, Phil M. Rice, Victor Y. Lee, Craig J. Hawker, Willi Volksen, James L. Hedrick, Robert D. Miller

Journal:

Angewandte Chemie International Edition

Année:

2003

Fichier:

PDF, 26 KB

2003

19

Oriented Nanoporous Lamellar Organosilicates Templated from Topologically Unsymmetrical Dendritic-Linear Block Copolymers

Teddie Magbitang, Victor Y. Lee, Jennifer N. Cha, Hsiao-Lin Wang, W. Richard Chung, Robert D. Miller, Geraud Dubois, Willi Volksen, Ho-Cheol Kim, James L. Hedrick

Journal:

Angewandte Chemie International Edition

Année:

2005

Langue:

english

Fichier:

PDF, 303 KB

english, 2005

20

ChemInform Abstract: Application of Complex Macromolecular Architectures for Advanced Microelectronic Materials

James L. Hedrick, Teddie Magbitang, Eric F. Connor, Thierry Glauser, Willi Volksen, Craig J. Hawker, Victor Y. Lee, Robert D. Miller

Journal:

Année:

2002

Fichier:

PDF, 25 KB

2002

21

“Living” free radical polymerization of macromonomers: Preparation of well defined graft copolymers

Craig J. Hawker, David Mecerreyes, Edmund Elce, Julian Dao, James L. Hedrick, Ibrahim Barakat, Phillippe Dubois, Robert Jérôme, Willi Volksen

Journal:

Macromolecular Chemistry and Physics

Année:

1997

Langue:

english

Fichier:

PDF, 527 KB

english, 1997

22

Solvent and isomer effects on the imidization of pyromellitic dianhydride-oxydianiline-based poly(amic ethyl ester)s

Nancy C. Stoffel, Edward J. Kramer, Willi Volksen, Thomas P. Russell

Journal:

Année:

1993

Langue:

english

Fichier:

PDF, 749 KB

english, 1993

23

Patterned nanoporous poly(methylsilsesquioxane) thin films: a potential high density substrate

Zach L Hogan, Cortney R Kreller, Kiet A Tran, Mark W Hart, Gregory M Wallraff, Sally A Swanson, Willi Volksen, Victor Y Lee, Teddie P Magbitang, James L Hedrick, Craig J Hawker, Robert D Miller, Ho-Ch

Journal:

Materials Science and Engineering: C

Année:

2004

Langue:

english

Fichier:

PDF, 245 KB

english, 2004

24

Curing studies of the meta, para and 50/50 mixed isomers of the ethyl ester of 4,4′-oxydianiline/pyromellitic dianhydride polyamic acid

Mark Konieczny, Huizhu Xu, Richard Battaglia, Stephanie L. Wunder, Willi Volksen

Journal:

Année:

1997

Langue:

english

Fichier:

PDF, 1.14 MB

english, 1997

25

Forward recoil spectrometry study of the diffusion of PMDA/ODA-based poly(amic ethyl esters)

Nancy C. Stoffel, Sweta Chandra, Edward J. Kramer, Willi Volksen, Thomas P. Russell

Journal:

Année:

1997

Langue:

english

Fichier:

PDF, 608 KB

english, 1997

26

Equilibration of mixtures of polyamic acids studied using size-exclusion chromatography and light scattering

Patricia M. Cotts, Willi Volksen, Susan Ferline

Journal:

Journal of Polymer Science Part B: Polymer Physics

Année:

1992

Langue:

english

Fichier:

PDF, 444 KB

english, 1992

27

On-line measurement of the RMS radius of gyration and molecular weight of polyimide precursor fractions eluting from a size-exclusion chromatograph

Seong Kim, Patricia M. Cotts, Willi Volksen

Journal:

Journal of Polymer Science Part B: Polymer Physics

Année:

1992

Langue:

english

Fichier:

PDF, 544 KB

english, 1992

28

Porous organosilicates low-dielectric films for high-frequency devices

André Knoesen, Ge Song, Willi Volksen, Elbert Huang, Teddie Magbitang, Linda Sundberg, James L. Hedrick, Craig J. Hawker, Robert D. Miller

Journal:

Journal of Electronic Materials

Année:

2004

Langue:

english

Fichier:

PDF, 285 KB

english, 2004

29

Effect of precursor history on residual stress and relaxation behaviour of high temperature polyimides

Moonhor Ree, Sally Swanson, Willi Volksen

Journal:

Année:

1993

Langue:

english

Fichier:

PDF, 795 KB

english, 1993

30

Detection of open or closed porosity in low-κ dielectrics by solvent diffusion

Marcus A. Worsley, Mark Roberts, Stacey F. Bent, Stephen M. Gates, Thomas Shaw, Willi Volksen, Robert Miller

Journal:

Microelectronic Engineering

Année:

2005

Langue:

english

Fichier:

PDF, 153 KB

english, 2005

31

Toughening of nanoporous glasses using porogen residuals

Maidenberg, Daniel A., Volksen, Willi, Miller, Robert D., Dauskardt, Reinhold H.

Journal:

Nature Materials

Année:

2004

Langue:

english

Fichier:

PDF, 320 KB

english, 2004

32

Post Porosity Plasma Protection: Scaling of Efficiency with Porosity

Theo Frot, Willi Volksen, Sampath Purushothaman, Robert L. Bruce, Teddie Magbitang, Dolores C. Miller, Vaughn R. Deline, Geraud Dubois

Journal:

Advanced Functional Materials

Année:

2012

Langue:

english

Fichier:

PDF, 425 KB

english, 2012

33

Light-induced orientation in a high glass transition temperature polyimide with polar azo dyes in the side chain

Sekkat, Zouheir, Wood, Jonathan, Aust, Emil F., Knoll, Wolfgang, Volksen, Willi, Miller, Robert D.

Journal:

Journal of the Optical Society of America B

Année:

1996

Langue:

english

Fichier:

PDF, 347 KB

english, 1996

34

Light-induced orientation in azo-polyimide polymers 325 °C below the glass transition temperature

Sekkat, Zouheir, Wood, Jonathan, Knoll, Wolfgang, Volksen, Willi, Miller, Robert D., Knoesen, André

Journal:

Journal of the Optical Society of America B

Année:

1997

Langue:

english

Fichier:

PDF, 285 KB

english, 1997

35

Correlation between polymer architecture and sub-glass-transition-temperature light-induced molecular movement in azo-polyimide polymers: influence on linear and second- and third-order nonlinear optical processes

Sekkat, Zouheir, Prêtre, Philippe, Knoesen, André, Volksen, Willie, Lee, Victor Y., Miller, Robert D., Wood, Jonathan, Knoll, Wolfgang

Journal:

Journal of the Optical Society of America B

Année:

1998

Langue:

english

Fichier:

PDF, 349 KB

english, 1998

36

Miscibility in Organic/Inorganic Hybrid Nanocomposites Suitable for Microelectronic Applications: Comparison of Modulated Differential Scanning Calorimetry and Fluorescence Spectroscopy

Huang, Q. R., Kim, Ho-Cheol, Huang, Elbert, Mecerreyes, David, Hedrick, James L., Volksen, Willi, Frank, Curtis W., Miller, Robert D.

Journal:

Année:

2003

Langue:

english

Fichier:

PDF, 303 KB

english, 2003

37

Synthesis and characterization of a thermotropic, liquid-crystalline polyester comprising phenyl benzoate groups connected via a tris(ethylene oxide) spacer

Volksen, Willi, Yoon, D. Y., Cotts, P. M.

Journal:

Année:

1989

Langue:

english

Fichier:

PDF, 1.55 MB

english, 1989

38

Independent Control of Adhesive and Bulk Properties of Hybrid Silica Coatings on Polycarbonate

Lionti, Krystelle, Cui, Linying, Volksen, Willi, Dauskardt, Reinhold, Dubois, Geraud, Toury, Berangere

Journal:

ACS Applied Materials & Interfaces

Année:

2013

Langue:

english

Fichier:

PDF, 1.00 MB

english, 2013

39

Photopatterned Nanoporous Media

Kim, Ho-Cheol, Wallraff, Gregory, Kreller, Cortney R., Angelos, Sarah, Lee, Victor Y., Volksen, Willi, Miller, Robert D.

Journal:

Année:

2004

Langue:

english

Fichier:

PDF, 421 KB

english, 2004

40

Effect of Porogen Molecular Architecture and Loading on Structure of Porous Thin Films

Lee, Hae-Jeong, Soles, Christopher L., Vogt, Bryan D., Liu, Da-Wei, Wu, Wen-li, Lin, Eric K., Kim, Ho-Cheol, Lee, Victor Y., Volksen, Willi, Miller, Robert D.

Journal:

Chemistry of Materials

Année:

2008

Langue:

english

Fichier:

PDF, 1.44 MB

english, 2008

41

High-Resolution Profiling of the Polyimide−Polyimide Interface

Stoffel, Nancy C., Dai, Chi-An, Kramer, Edward J., Russell, Thomas P., Deline, Vaughn, Volksen, Willi, Wu, Wen-li, Satija, Sushil

Journal:

Année:

1996

Langue:

english

Fichier:

PDF, 274 KB

english, 1996

42

Well-Defined Random Copolymers by a “Living” Free-Radical Polymerization Process

Hawker, Craig J., Elce, Edmund, Dao, Julian, Volksen, Willi, Russell, Thomas P., Barclay, George G.

Journal:

Année:

1996

Langue:

english

Fichier:

PDF, 94 KB

english, 1996

43

Selective Sorption of Nanoporous Poly(methyl silsesquioxane)

Kim, Ho-Cheol, Wilds, Jason B., Hinsberg, William D., Johnson, Larry R., Volksen, Willi, Magbitang, Teddie, Lee, Victor Y., Hedrick, James L., Hawker, Craig J., Miller, Robert D., Huang, Elbert

Journal:

Chemistry of Materials

Année:

2002

Langue:

english

Fichier:

PDF, 163 KB

english, 2002

44

Phase Separation Behavior of Poly(methyl methacrylate- co -dimethylaminoethyl methacrylate)/Methyl Silsesquioxane Hybrid Nanocomposites Studied by Dansyl Fluorescence

Huang, Q. R., Frank, Curtis W., Mecerreyes, David, Volksen, Willi, Miller, Robert D.

Journal:

Chemistry of Materials

Année:

2005

Langue:

english

Fichier:

PDF, 136 KB

english, 2005

45

Neutron Reflectivity on Nanoporous Poly(Methylsilsesquioxane) Thin Films

Kim, Ho-Cheol, Volksen, Willi, Miller, Robert D., Huang, Elbert, Yang, Gaiying, Briber, Robert M., Shin, Kwanwoo, Satija, Sushil K.

Journal:

Chemistry of Materials

Année:

2003

Langue:

english

Fichier:

PDF, 96 KB

english, 2003

46

Structure and Interaction of Organic/Inorganic Hybrid Nanocomposites for Microelectronic Applications. 1. MSSQ/P(MMA- co -DMAEMA) Nanocomposites

Huang, Q. R., Volksen, Willi, Huang, Elbert, Toney, M., Frank, Curtis W., Miller, Robert D.

Journal:

Chemistry of Materials

Année:

2002

Langue:

english

Fichier:

PDF, 986 KB

english, 2002

47

Pore Morphologies in Disordered Nanoporous Thin Films

Hedstrom, Jonathan A., Toney, Michael F., Huang, Elbert, Kim, Ho-Cheol, Volksen, Willi, Magbitang, Teddie, Miller, Robert D.

Journal:

Année:

2004

Langue:

english

Fichier:

PDF, 452 KB

english, 2004

48

Versatile synthesis of nanometer sized hollow silica spheresElectronic supplementary information (ESI) available: experimental; IR and XPS; AFM, SEM and TEM images. See http://www.rsc.org/suppdata/cc/b2/b212811j/

Cornelissen, Jeroen J. L. M., Connor, Eric. F., Kim, Ho-Cheol, Lee, Victor Y., Magibitang, Teddie, Rice, Philip M., Volksen, Willi, Sundberg, Linda K., Miller, Robert D.

Journal:

Chemical Communications

Année:

2003

Langue:

english

Fichier:

PDF, 588 KB

english, 2003

49

Configurational characteristics and nematic order of semiflexible thermotropic polymers

Yoon, Do Y., Bruckner, Sergio, Volksen, Willi, Scott, J. Campbell, Griffin, Anselm C.

Journal:

Faraday Discussions of the Chemical Society

Année:

1985

Langue:

english

Fichier:

PDF, 1.16 MB

english, 1985

50

A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0

Volksen, Willi, Magbitang, Teddie P., Miller, Robert D., Purushothaman, Sampath, Cohen, Stephan A., Nakagawa, Hisashi, Nobe, Youhei, Kokubo, Terukazu, Dubois, Geraud J. M.

Journal:

Journal of The Electrochemical Society

Année:

2011

Langue:

english

Fichier:

PDF, 618 KB

english, 2011